Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip.docVIP

Sensors 2010, 10, 1753-1764; doi:10.3390/s100301753 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip Ching-Liang Dai 1,*, Yen-Chi Chen 1, Chyan-Chyi Wu 2 and Chin-Fu Kuo 3 1 Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan; E-Mail: metallica0515@ (Y.-C.C.) 2 Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan; E-Mail: ccwu@.tw (C.-C.W.) 3 Microsystems Technology Center, Industrial Tech