新型SU-8光纤法布里-珀罗压力传感器的设计仿真.pdfVIP

2012 年全国光学工程博士生论坛论文集 新型 SU-8 光纤法布里-珀罗压力传感器的设计仿真 戴丽华，王 鸣，戎 华 南京师范大学物理科学与技术学院,江苏省光电技术重点实验室 江苏 南京 210046 摘要 本文主要提出了一种利用 SU-8 光刻胶形成高深宽比结构的新型压力传感器。为了解决传统压力 传感器测量范围受限的问题，通过特定的结构设计，实现敏感膜形变量与法布里-珀罗腔长变化量的分 离且相关的关系。该传感器基于法布里-珀罗（Fabry-Perot,F-P ）干涉原理和相位解调理论测量压力。通 过仿真逐一确定了结构参数，在半径为1500 μm ，厚度为100 μm 的硅圆膜上，利用SU-8 光刻胶形成一 个边长为100 μm ，高400 μm 的位移柱作为压力传感器的主要感应部件，通过敏感膜受力形变带动位移 柱倾斜，以此改变法布里-珀罗腔的腔长。结构模型的灵敏度通过仿真测得为2.606 μm/MPa 。以此为指 导进行了基本的工艺实验，明确了主要的工艺步骤。 关键词 光学；光纤压力传感器；法布里-珀罗干涉测量；SU-8 光刻胶 The Study of a Novel SU-8 Fiber Fabry-Perot Pressure Sensor Lihua Dai ，Ming Wang * ，Hua Rong (Jiangsu Key Laboratory of Opto-Electronic Technology, School of Physical Science and Technology, Nanjing Normal University, Nanjing 210046, P. R. China) Abstract A novel pressure sensor based on a high aspect ratio structure formed by SU-8 photoresist is proposed. The advantage of the structure lies mainly in the design of separation of sensing membrane deformation with the length change of Fabry-Perot cavity, which restricts the linear measurement in mostly traditional pressure sensors. The sensor is based on Fabry-Perot interferometer and phase demodulation method. The parameters of the structure have been ascertained, which will be dealt with during sensor fabrication through numerical simulation. The mainly sensing elements of the designed model include a silicon membrane and a square column on it. The membrane is with diaphragm thickness of 100μm and radius of 1500μm. Meanwhile, the square column is with the dimension of 100μm×100μm×400μm. The sensitivity of the structure model is presented as 2.606μm/MPa from simulation. Under the guidance of the simulations, the fundamental process is carri