基于EFAB工艺的可植入RFID天线设计-福州大学学报.PDF

35 3 () V o l. 35 N o. 3 2007 6 Journa l of F uzhou Un iversity( N atura l Sc ience) Jun. 2007 1000 - 2243( 2007) 03- 04 09 - 06 EFABRFID 1, 2 1 , ( 1. , 361005; 2. , 361005) RF ID , RF ID , RF ID . RF ID , M EM S EFA B, RF ID , RF ID . M EM S; EFA B; RF ID; TN 820. 12; TN 82 1. 4; TN 61 A Antenna design of implantable RFID based on EFAB technology 1, 2 1 GUO D ong- hu i , CHEN H u a- jun ( 1. D ep artm ent o f Physics, X iam en U n iversity, X iam en, Fuj ian 361005, Ch ina; 2. D ep artm ent o f E lectronic Eng i neering, X iam en U niversity, X iam en, Fuj ian 361005, China) Abstract: T his p aper is to present a new techno logy for antenna design of mi p lantable RF ID. A s mi plantab le RF ID are norm ally u sed as act ive dev ices for anmi al identification, b io log ic m edica l sensor, and so on, sm all size and h igh working efficiency are the b asic requ irem ent for their mi plant w ithout bod ily d iscom fort. H ere, w e introdu ce a new MEM S process - EFAB process, and u se it to design a m icro- co il antenna for mi plantable RF ID. W ith its design ru les and e lectronic param eters, our smi u la t ion results show th at the m icro- co il antenna m eets requ irem ent of mi plantable RF ID. Keywords: MEM S process; EFA B process; mi p lantable R