薄膜光电性能表征用小型液氮低温恒温器.pdfVIP

第49 卷第2 期 真 空 VACUUM Vol. 49, No.2 2012 年3 月 Mar. 2012 薄膜光电性能表征用小型液氮低温恒温器* 李建昌，李宏宇，巴德纯 （东北大学机械工程与自动化学院真空流体工程研究中心，辽宁 沈阳 110004） 摘 要：本文介绍了一种高真空低温环境下用于薄膜光电性能研究的小型液氮低温恒温器，它能提供稳 定低温并与外界隔绝的真空环境，可广泛用于薄膜材料的光学、磁热、超导和电学性能研究领域。系统通 过液氮杜瓦和基片加热装置使样品维持在所需的低温高真空条件下，既能通过外接光源将光线引入真空 室并辐照在样品上或通过真空电极引线测试样品的电学特性，也可实现薄膜的光电性能表征。热负荷计 算与分析表明，该系统可长时间保持所需的低温真空环境，且该装置具有结构简单、体积小和温控稳定等 优点，适于薄膜器件的真空低温变温研究。 关键词：低温恒温器；杜瓦绝热；薄膜器件；真空系统 中图分类号：TB657.3;TB43 文献标识码：B 文章编号：1002-0322 （2012）02-0052-04 A small liquid-nitrogen cryostat for studying the optical-electrical properties of thin films LI Jian-chang, LI Hong-yu, BA De-chun ( Vacuum and Fluid Engineering Research Center, Northeastern University, Shenyang 110004, China ) Abstract: This paper presents a simple liquid -nitrogen cryostat for studying the optical -electrical properties of thin films at variable low temperature (90K ~300K) under high vacuum conditions. It provides a stable and insulated low temperature condition, which can be widely used in the fields of optical, thermo -magnetic and superconductic materials. The sample can be maintained at any required temperature through a combination of a liquid-nitrogen Dewar apparatus and a heating unit. To measure the samples photoelectrical properties, current -voltage characteristics of the samples can be studied under specific light illumination through an optical window on the cryostat. The heat load calculation indicates that the system can guarantee the desired low temperature env