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Anal. Chem. 2007, 79,
Fully Microfabricated and Integrated SU-8-Based
Capillary Electrophoresis-Electrospray Ionization
Microchips for Mass Spectrometry
Tiina Sikanen,†,‡ Santeri Tuomikoski,§ Raimo A. Ketola,‡,⊥ Risto Kostiainen,‡ Sami Franssila,§ and
Tapio Kotiaho*,†,‡
Laboratory of Analytical Chemistry, Department of Chemistry, P.O. Box 55, FI-00014 University of Helsinki, Finland, Division
of Pharmaceutical Chemistry, Faculty of Pharmacy, P.O. Box 56, FI-00014 University of Helsinki, Finland, Micro and
Nanosciences Laboratory, Department of Electrical and Communications Engineering, P.O. Box 3500, FI-02015 Helsinki
University of Technology, Finland, and Drug Discovery and Development Technology Center, P.O. Box 56,
FI-00014 University of Helsinki, Finland
We present a fully microfabricated and monolithically for bioanalysis. In recent years, numerous chip-based designs46
integrated capillary electrophoresis (CE)-electrospray ion- have been presented for miniaturization of the ESI source in order
ization (ESI) chip for coupling with high-throughput mass to reach more efficient ionization through nanospray.7,8 Most
spectrometric (MS) analysis. The chips are fabricated fully importantly, nanospray ionization provides not only increased
of a negative photoresist SU-8 by a standard lithographic sensitivity but also direct coupling with microfluidic separation
process which enables straightforward batch fabrication devices due to congruent flow rates between the two.
of multiple chips with precisely controlled dimensions Chip-based ESI sources have been implemented on various
and, thus, reproducible analytical performance from chip materials, including silicon, glass, and polymers.46 Dependi
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