多层反膜系反射特性的计算机模拟计算与其应用.pdf

20 1 Vol. 20 No. 1 2006 3 JOU RNAL OF SHANGHAI UNIVERSIT Y OF ENGINEERING SCIENCE M ar. 2006 : 1009- X( 2006) 01- 00 9- 05 王 珊 ( , 201620) : 根据薄膜光学与膜系设计的原理, 对非四分之一波长的多层反射膜系的反射特性进行 计算, 总结出高折射率薄膜的光学厚度与膜系的倍频反射带之间的关系, 并以此指导设计出特殊 要求的多层反射膜系 : 膜系设计; 多层反射膜; 反射率 : O 8 . 1 : A Computer Calculat ion and Application of Ant iref lect ive Mult iLayer Coat ingsOptical Performance WA N G Shan ( College of Fundamental Studies, Shanghai University of Engineering Science, Shanghai 201620, China) Abstract: The optical performance of AR multilayer coatings w ith nonquarter w avelength thickness w as calculated by the theory of optical thin films. Reflectance characteristics w ith the changing of optical thickness of high refractive index layers were found and applied to the design of special AR multilayer coatings. Key words: coatingdesign; antireflective multilayer coatings; reflectance , 1 ; [2] [ 1] , , 0/ , , 0 , : N GHLHLH LHA = G( HL) HA N = 1, 2, 3 : 2005- 12- 01 : ( 05XPQ30) : ( 1979- ) , , , , . 20 50 , G A ( ) ; H L ; N 2 , ng 0/