MEMS原理-08精选.pptVIP

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MEMS原理-08精选

* * * * * * * * * * * * * * * * Bio-sensors -- Some examples Electrochemical Bio-sensors (2) Electrochemical sensors The physical size, geometry, selection of various components, and the construction of an electrochemical sensor usually depends on its intended use. Quite often, the final design results in a compromise between various performance parameters of the electrochemical sensor. The most common misconception about electrochemical sensors is that they are all the same. In fact, the appearance of the electrochemical sensors used to detect various gases may be similar, but their functions are markedly different. Consequently, one can expect varying performance from each of these sensors, in terms of sensitivity, selectivity, response time, and operating life. Bio-sensors -- Some examples Electrochemical Bio-sensors (3) Typical electrochemical sensor setup Principle of Operation Electrochemical sensors operate by reacting with the gas of interest and producing an electrical signal proportional to the gas concentration. A typical electrochemical sensor consists of a sensing electrode (or working electrode), and a counter electrode separated by a thin layer of electrolyte, seen in the Figure. Importance of a Reference Electrode Bio-sensors -- Some examples Electrochemical Bio-sensors (4) Principle of Operation Hydrophobic membrane: prevents liquid electrolyte from leaking out. Gas that comes in contact with the sensor first passes through a small capillary-type opening and then diffuses through a hydrophobic barrier, and eventually reaches the electrode surface. This approach is adopted to allow the proper amount of gas to react at the sensing electrode to produce a sufficient electrical signal while preventing the electrolyte from leaking out of the sensor, seen in the figure. Bio-sensors -- Some examples Electrochemical Bio-sensors (5) Principle of Operation Filtering with activated charcoal Major Components A. Gas Permeable Membrane B. Electrode C. Electrol

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