一维氧化镓纳米材料研究进展.docxVIP

一维氧化镓纳米材料研究进展摘要：本文从β-Ga2O3的制备，性质及β-Ga2O3在气体传感器和深紫外光电探测器的纳米器件中的应用等方面，介绍了一维β-Ga2O3纳米材料。关键词：氧化镓；一维纳米材料；气体传感器；光电探测器Research Progress of One - dimensional Gallium Oxide NanomaterialsAbstract：In this paper one-dimensional β-Ga2O3 nanomaterials are introduced from the aspects of preparation and properties of β-Ga2O3 and the application of β-Ga2O3 in nanosensors of gas sensors and deep ultraviolet photodetectors.Key words: gallium oxide; one-dimensional nanomaterials; gas sensors; photodetectors1.引言随着电子技术的发展，微米级器件研发利用已不能满足器件对高集成度和低功耗的要求，并且器件集成度的提高要求器件特征尺寸必须减小。相比于块体材料，由于一维纳米材料具有优异的光、电、磁等性能，近年来一维纳米材料己经成