立方氮化硼薄膜地形核与生长过程试验研究.PDFVIP

18 6 Vol.18 No.6 2005 12 CHINA SURFACE ENGINEERING Dec. 2005 10 2005 * 100072 FTIRX XPS AFM FTIR c–BN TG 174.444 A 1007–9289(2005)06–0010–06 Investigation of Nucleation and Ggrowth Process of Cubic Boron Nitride Films CAI Zhi-hai ZHANG Ping TAN Jun Nation