MFC技术知识(国外英文资料).doc

MFC技术知识(国外英文资料) 1. what is the mass flow meter? What is the mass flow controller? Mass Flow Meter mass flowmeter (abbreviated as MFM), is an accurate measurement of gas flow meter, the measured value is not due to temperature or pressure fluctuation and misalignment, without compensation of temperature and pressure. Mass flow controller, namely Mass Flow Controller (abbreviated as MFC), not only has the function of mass flowmeter, more importantly, it can automatically control the gas flow, the user can according to the need for flow setting, MFC will automatically flow constant at the set value, even if the system pressure fluctuations or ambient temperature changes dont deviate from the set value. Simply speaking, the mass flow controller is a flow stabilizing device, a gas flow stabilizing device is set manually or connected with the computer automatic control. What is the principle of the 2. mass flow controller? The mass flow controller comprises a flow sensor, shunt channel, flow control valve and amplification controller etc.. The profile structure shown in Figure 1 the mass flow controller. The mass flow rate of gas flow sensor by measuring capillary gas temperature difference of heat transfer principle calorimetry (no temperature and pressure compensation). The flow sensor heating bridge measured into the amplifier, flow detection amplified voltage is compared with the set voltage, then the difference of the amplified signal to control valve, flow control flowing through the channel and make the setting flow equal. Decide the main channel flow diverter. Matching with the mass flow controller flow display device is arranged on the power supply, digital voltage meter, setting potentiometer, peripheral and internal conversion and three valve switch etc.. Gas mass flow controller and display the flow of working principle after the connection as shown in figure 2. Figure 1. the mass flow controller structure Tutu 2. mass flow controller principle diagram 3. how