操作步骤(国外英文资料).doc

操作步骤(国外英文资料) Single crystal furnace charging Installation of silicon material A. take the loading of stainless steel car and silicon material, carefully check the contents of the ingredient list is consistent with the single crystal furnace number, material in kind, if abnormal, timely processing and report to the monitor or director. B. change the gloves for charging. If there is a master alloy, put it into the quartz crucible. Then, the small material scrap tile in the pot. C. bulk material is placed with medium material is placed in the center, around the top left and right aniseed to be fixed into a small gap in silicon material. Loading should be careful operation, gently handle, to prevent the collision of quartz crucible, do not drop the material in the gap of the heat preservation cover, so as not to cause fire. Take care not to draw the material out of the quartz crucible during the charging of the D., otherwise it will cause the flow of silicon liquid in the melting process, damage the graphite parts, or even stew the furnace. After the completion of loading of E. open crucible rotation rotation around the gap, confirm, and then quickly reduced to limit the crucible. Stop spinning. F., the upper and upper crucible heater insulation cover upper part and then clean cleaning brush the net absorption of dust and silicon slag. G. installed insulation cap and guide tube in turn. When installing the heat shield, the flow should be identical with each other. When the guide tube is installed, the operation should be carried out carefully. If the silicon material is contacted, the placement of the silicon material shall be adjusted so as to prevent the dip of silicon in the process of material discharge. Specific operation steps of single crystal furnace 1, purpose In order to operate the single crystal furnace correctly and formally, and ensure the normal operation of the production, the specifications are specially made. 2, scope of application Suitable for TDR-70