面向产业需求的21 世纪微电子技术的发展( 上).PDFVIP

21() * ­ 王阳元 黄 如 刘晓彦 张 兴 ( 100871) .,, , 10) 15 , . 21 , , 21 . : ,(scaling down) , ; , ( SOC) (IC) ; , ,, ; ,) ) ) (MEMS)., . ,, , , Development of microelectronics technology to meet industry needs in the 21st century ­ WA G Yang-Yuan HUA G Ru LIU Xiao-Yan ZHA G Xing ( Institute of Microelectronics , Peking University, Beji ing 100871, China) Abstract The microelectronics industry is of strategic importance to both the domestic economy and national de- fense. After a long period of endeavor, themicroelectronics industry in China is about towitnessrapidgrowth. With continuing efforts in the coming 10to 15 years, she should become a power in the microelectronics industry. In this paper the demandsof the 21st century on the microelectronics industry are reviewed. It isexpectedthat the size of in- tegrated circuit will continueto be scaleddown. Device design and fabrication, including new structures, technique, andmaterials, will progress rapidly, as well as photolithography and interconnect technology. Based on the scaling down trend, the system-on-a-chip will ultimately replace current integrated circuits andbecome the mainstream prod- ucts. On the other hand, nano-electronicswill see new breakthroughs. Research into quantum devices andmolecular electronic deviceswill be paid increasing attentionwiththe aim to realize integration ultimately. In addition, MEMS technology, a new field born our of the combination of microelectronics and other research domains, w