利用喷雾热解法制备铈锆矽三元氧化物粉体於氧气感测器之应用-YOKE.docVIP

利用噴霧熱解法製備鈰/鋯/矽三元氧化物粉體於氧氣感測器之應用 Preparation of ZDC/Si ternary?oxide powder by spray pyrolysis for oxygen sensor application 江惠瑜* 張凱昕 陳錦毅 (Hui-Yu Chiang*, Kai-Hsin Chang, Chin-Yi Chen) 逢甲大學材料科學與工程系 Department of Materials Science and Engineering, Feng Chia University 摘　　要 本研究探討矽離子添加對鈰/鋯氧化物在溫度範圍823K(1123K之導電性質、氧分壓感測行為，與其在1123K之應答時間影響。製程中分別以硝酸鈰、硝酸氧鋯以及矽酸四乙酯作為前驅物，利用噴霧熱解法合成氧化鋯摻雜氧化鈰（ZDC）與添加矽離子之鈰/鋯/矽三元氧化物粉體（ZDC/Si）。其微結構影像顯示ZDC顆粒皆呈中空球狀，且在添加矽離子後導致ZDC之顆粒表面較不平整；經XRD分析得知，ZDC/Si粉體為立方螢石結構，而矽離子的添加對ZDC的晶格常數有增大的作用。藉由網印將粉體製成厚膜並於1473K進行熱處理後，其電性量測中發現，除電阻因矽離子之添加即有所降低外，ZDC之導電行為亦有傾向離子導電的現象，並因晶粒尺寸下降而具較短之應答時間。 關鍵字：噴霧熱解法、氧化鈰、氧化鋯、氧化矽、電阻式氧氣感測器。 Abstract In the present study, the influences of silicon ion addition on the microstructure, electric conductivity and oxygen sensing behavior of zirconia-doped ceria (ZDC) solid solution within a temperature range of 823(1123K were investigated. The responses to oxygen pressure change for the corresponding coatings at 1123K were also discussed. Nanocrystalline ZDC/Si ternary oxide powders were prepared from cerium nitrate hydrate (CeNH), zirconium nitrate hydrate (ZrNH) and tetraethyl silicate (TEOS) by spray pyrolysis. The microstructural observations showed that the powders were spherical with hollow structures. The particle surface became rougher by adding with silicon ion. The XRD data identified the ZDC/Si powders as a cubic fluorite structure. The lattice constant of ZDC increased as silicon ion was added. The powders were then screen-printed and heat treated at 1473K to result in coatings. The electrical measurements showed that the additions of silicon ion did not only reduce the resistance of the coatings, but the conductive behavior also tended to convert into ionic conductance. The response to oxygen pressure change became faster because of the decreases in grain size of ZDC. Keywords: Spray pyrolysis, Ceria, Zirconia, Silica, Resistive oxygen gas sensor. 一、前言 隨著現今科技的進步，隨之而來的是許多廢氣污染的問題需待解決。若能精確控制燃料進料量與空氣進氣量之氣燃比(Air/Fuel ratio)，則可藉由維持符合化學計量比