六轴加速度计的结构原理与阻尼振动设计_唐富荣.pdfVIP

2002 12　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　 4 Mechanics Principl e and Damping Design of a Six-Axial Accel erometer TAN GFurong, X UE Datong ( . , 7 30000 , . . ) L anzhou Institute of Physics Chinese Academy of pace Technology L anzhou P R China : 　 Abstract Elect rostatically suspended acceleromet er is a kind of accelerom et er with the highest precision in the w orld. The design ob ectiv e of the accelerometer described i n the paper is: Rang e of 12. 5μgn , Sensitivity of 1 n ng , and Frequency Bandwidth of 0. 1 Hz. Based on the design of the m echanics, the paper descri bes, in de- tail, the m easurement princi ples of displacement and micro-acceleration. Then, it probes i nto the possibi lity of six-axial measurement by proper design of the capacitance elect rodes. Finally, it analyses the sy stem of elect ro- static suspension of the acceleromenter. The analysis result indicat es that the dampi ng vibration f requency of the sy stem is 0. 825 Hz, and the detecting circuit for accelerations should hav e a sampli ng tim e interval of 4 s. The paper may hav e im portant values fo r the dev elo pment of the high -precision multi-axial accelerom et ers. : 　 ; ; ; Key words accelerometer elect rost atic suspension elect rostatic supporting dam pi ng ① 唐富荣,薛大同 ( ,　730000) : ,: 12. 5μg , 1 ng , n n 0. 1 。 , Hz 。, , ()。 , 1 atm , 0. 825 Hz , 4 。s 。 : ;;; : T P212. 1　　　: A　　　: 1004- 1699 ( 2002) 04- 0287- 06 1964 , 1　　 ON ERA ,