光学非球面离子束加工模型及误差控制.pdfVIP

17 11 Vol. 17 No. 11 2009 11 Opt ics and Precision Engineering Nov . 2009 100 92 X( 2009) 1, 2 1 1 1, 2 武建芬 , 卢振武 , 张红鑫 , 王泰升 ( 1. 中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033; 2. 中国科学院研究 院, 北京100039) : , , , , , , 0.0381; , : 离子束加工; 非球面; 定位误差分析; 驻留时间矩阵方程 :T Q171. 68 : A Model of ion beam figuring in aspheric optics and its error control 1, 2 1 1 1, 2 WU Jianfen , LU Zhenw u , ZHANG H ongxin , WANG T aisheng ( 1. Chang chun I nstitute of Op tics , Fine Mechanics and P hy sics , Chinese A cad emy of Sciences , Changchun 130033, China; 2. Gr ad uate Uni ersity of Chinese A cademy of S ciences , Beij ing 100039, China) Abstract: Ion Beam Figuring ( IBF) technology w as investigated for application to a highprecision op tical aspheric. With the analysis of the IBF system, the motion model formulas of an ion source sub system w ere presented for figuring aspheric optics and other optics by the IBF facility. The decon volved process of the dw ell time function w as transferred to a linear matrix equation, w hich could be easily optimized to get the optimized dw ell time solution. U sing an analysis of the location errors, this paper proposes that the final figure errors caused by the location errors of the ion source fiveaxis mo tion subsystem could be attributed to a coefficient factor. T he best w ay to avoid the location precision requirements is to take both the ion beam material removal function and the location errors into ac count in designing the fiveaxis system accurately . T he simulation example proves t