工程与生活 cmos微机电于生活中的应用 - 国立彰化师范大学.ppt

* * * * * * * 1. MEMS Microphone Process Flow CMOS Microphone Gas Sensor Applications Cities and states may soon have a new high-tech tool in the battle against automotive air pollution, thanks to NASA satellite technology originally developed to track global greenhouse gases and the Earths protective ozone layer. As envisioned, NASAs atmospheric remote sensing technology will be adapted to an autonomous roadside system to monitor motor vehicle emissions. Cars and trucks will pass through a low-power light beam, without stopping or slowing down. Space-age sensor technology will instantly anal