电镀硬质氧化铝薄膜热残余应力测量 - 表面技术.pdfVIP

摇摇 108 梅芳等摇 电镀硬质氧化铝薄膜热残余应力测量 藡蕥蕥蕥蕥蕥蕥蕥蕥蕥藡蕥蕥 标准及检测 藡蕥蕥蕥蕥蕥蕥蕥蕥蕥 藡 电镀硬质氧化铝薄膜热残余应力测量 1 2 梅芳 ,弓满锋 (1.湛江师范学院物理科学与技术学院,湛江524048;2.湛江师范学院机电工程研究所,湛江524048) 摇 摇 [摘摇 要]摇 欲改善电镀氧化铝薄膜/ 铝合金基体体系的服役寿命,需从整体上掌握其力学性能。 为此,分别 制备了特殊的铝合金热残余应力试样和沉积夹具,采用硫酸阳极氧化法在铝合金基体上制备了10 ~60 滋m厚电 镀硬质氧化铝,通过曲率法测试了试样的热残余应力,并分析了薄膜厚度与其热残余应力之间的关系。 结果表 明:10~60 滋m厚的电镀硬质氧化铝薄膜热残余应力为较小的拉应力,且随着厚度的增加,应力值呈线性下降趋 势。 [关键词]摇 氧化铝薄膜;热残余应力;曲率法 [中图分类号]TB332 摇 摇 摇 [文献标识码]A 摇 摇 摇 [文章编号]1001鄄3660(2013)03鄄0108鄄04 Measurement of Thermal Residual Stress of Electroplate Hard Alumina Films 1 2 MEI Fang ,GONGMan鄄feng (1.School of Physics Science and Technology,Zhanjiang Normal University,Zhanjiang524048,China; 2.Institute of Mechatronic Engineering,Zhanjiang Normal University,Zhanjiang524048,China) [Abstract]摇 In order toimprovethe servicelifeof theelectroplatingaluminafilm/ Al鄄alloy substrate systems,it isneces鄄 sary to know their whole mechanical characteristics. Therefore,the special thermal residual stress specimen and depositingfix鄄 tureswere prepared,respectively. Alumina films of 10~60 滋mthicknesswere prepared by a positive pole oxidized technology in the sulfuric acid electroplating solution. The thermal residual stress of electroplating alumina filmswere measured by curva鄄 ture method. andtherelationshipbetweenthicknessandresidual stressof aluminafilmswasalsoanalyzed. Itconcludedthatthe residual stresses of electroplating hard alumina filmswere relatively small and tensile stress corresponding to 10~60 滋mthick鄄 ness,and the residual stresses decreased linearly with increasing thickness. [Key words]摇 alumina films;thermal residual stress;curvature method 摇 摇 铝合金基体上的电镀氧化铝薄膜在使用过程中, 命,人们开展了热残余应力的相关研究[4—5]。 本文通 表面常常萌生大量的微观裂纹或发生宏观开裂现象, 过曲