(电子电路基础专业英语）5-Nanometrology.ppt

Nanometrology Group members: Limei Ye; Xinxin Wang; Qun Qi; Zikang Wei; Shiyu Yang ; Lijin Deng. Contents 1. Introduction 2. Importance 3. Measurement technique 4. Applications 1. Introduction Nanometrology is to a large extent based on the development in?semiconductor technology. Nanometrology is the science of?measurement at the nanoscale level. 2. Importance of nanometrology A large sector of industry Expected to continue to grow at a very fast rate. Precise control of dimensions of objects Standards were developed to match technology advances and support the applications of nanostructures. 3. Measurement technique One of the most common measurement techniques Measure Topology, grain size and different forces ----Atomic Force Microscopy (AFM) Measurement technique Another instrument used Measure 3-D topology of the specimen Based on the concept of quantum tunneling ----Scanning Tunneling Microscope (STM) 4. Applications of nanometrology ----detect methyl Applications ---New material?surface detection  ---Detection?of magnetic nano?molecular? Applications The end Nanometrology