纳米薄膜界面滑移现象的分子动力学模拟进展.pdfVIP

# 114 # 材料导报:综述篇 2010 年3 月( 上) 第24 卷第3 期 1, 2 1 2 1 马潇均 ,钟占荣, 曹 勇 , 杜如虚 ( 1 , , 518055; 2 , 518055) 随着先进制造技术的发展, 许多精密系统中的薄膜 度已经接近纳米量级由于纳米尺度的特殊性, 宏观尺度下的界面性质将不再适用, 因此探索纳米尺度下的界面性质对于微机电系统( MEMS) 甚至纳机电系统 (NEMS) 中涉及到的润滑薄膜研究具有非常重要的价值Couette 流动作为剪切驱动流动的原形, 在研究薄膜界面 滑移现象上具有较高的代表性在总结国内外该方向研究成果的基础上,详细介绍和讨论了纳米尺度薄膜Couette 流动的分子动力学方法, 总结了现有的滑移现象和规律,并对今后的发展进行了展望 Development of Molecular Dynamics Simulation on Interfacial Slip Behavior for Nanometer Thin Films 1, 2 1 2 1 MA Xiaojun , ZHONG Zhanrong , CAO ong , DU Ruxu ( 1 Shenzhen Institute of Advanced Intergration T echnology Chinese Academy of Sciences and the Chinese University of Hong Kong, Shenzhen Institute of Advanced Technology Chinese Academy of Sciences, Shenzhen 518055; 2 Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055) Abstract With the development of advanced manufacturing technologies, the thin films used in precision sys- tems are approaching nano scale. Due to the characteristics of nano scale, the interfacial behavior attained from macro- scopic scale previously is not suitable. T herefore, studying the interfacial behavior of nanometer thin films used in the micro electro-mechanic systems(M EMS) even nano electro-mechanic systems( NEMS) is of great value of research. As the prototype of the shear-driven flow , Couette flow is highly representative in studying the interfacial slip behavior for nanometer thin films. Based on the review of the research results at home and abroad, the molecular dynamics (MD) simulat