大气微电浆装置实行复合驻极体薄膜之开发与测试 - 国家奈米元件实验室.pdf

NANO COMMUNICATION 22 No. 3 31 Utilized Micro Air Plasma Platform to Implement Composite Material of Electret Thin Film 1 2 2 1 1 1 2 ITO (Dielectric-barrier discharges) polydimethylsiloxane (PDMS) PDMS polytetrauoroethylene (PTFE) PDMS (E) (d33) 300 kPa 1500 pC/N PDMS Abstract This work has demonstrated a design for the micro air plasma device, by means of utilizing the different types of high voltage power suppliers, such as AC/DC power suppliers, different frequencies and waveforms, and utilizing ITO or metal films as electrodes. This device could make different purposes to implement, comprised multi-functions of micro air plasma charging device and micro air plasma generator with atmosphere or vacuum conditions. This work has successfully demonstrated the fabrication of piezoelectric polydimethylsiloxane (PDMS) films utilizing multi- layer casting, stacking, surface coating, micro plasma discharge processes, and integrated with micro air plasma devices as well. This PDMS films had micrometer-sized voids inside, which were connected to each other with a dimension of 50 5