长方光电iHawkXtrme Copper wire bonding调试与生产.ppt

长方光电Copper wire bonding Copper wire bonding Base information Machine :IHawkXtreme Serial No:XK06-003 LeadFrame:一詮10R×6C×3index Die:三安7×8mil Pad opening:3×3mil JiaBo copper wire(镀钯) E/L:6-15% T/S:5CN Size:0.9mil Copper wire bonding iHawkXtreme running status KS connx running status Connx copper wire bonding会撞断capillary，KS在更新Software Connx 生产状态不稳定，断线频繁 Connx更换霍力士镀钯copper wire与capillary，状态不稳定，断线频繁 CTM requirement Customer requirement Wire pull (0.9mil, Cu) 8g Ball Shear (0.9mil , Cu) 6g/mil2 Ball size not exceed bond pad (75um) 漏电测试 Copper wire bonding iHawkXtremeKS copper wire bonding quality contrast Copper wire bonding Ball shear evaluation CTM doesn’t have ball shear measuring apparatus, they used a needle to push out 1st bond, and then check IMC of pad surface Performance data analysis Mc major stoppage record Performance data analysis Mc major stoppage record Copper wire bonding iHawkXtreme两天生产数据 Copper wire bonding Missing ball 原因分析 8/30/2011生产9K材料无一次missing ball，在bonding前用氩气清洗机清洗用copper wire bonding的3528材料，以排除材料的不稳定性 8/31/2011生产的42K 3528材料在上午9：30至下午15：40生产过程中没有missing ball，随后的一片3528 材料开始出现连续的missing ball问题，为了排除客户材料的不确定性，再次将材料清洗，没有解决。 将镀钯copper wire即将用来bonding 的wire扯去一定长度的wire后继续bonding，在没有调试参数的前提下missing ball问题消失，此问题的原因可能是镀钯copper wire的工艺的不稳定性导致的。 Window clamp 建议 目前客户的3528 W/C是采用压tie bar的设计，这种压材料的方式导致3528 cup是压不紧，对copper wire bonding可能造成潜在的断线问题，建议采用压cup的设计方式。 Copper wire bonding 产品bonding效果图 Parameter setting EFO parameter setting Parameter setting BQM setting Parameter setting 1st bond parameter Parameter setting 2nd bond parameter setting Parameter setting Loop parameter setting Summary of CuPd wire bonding According to CTM QA feedback, bonding quality could reach CTM requirement basically Mc could run production continuously if material is good enough Current UPH is around 15K/hour Machine related MTBA is 41mins KS connx missing ball frequency for JIabo Hereaus copper wire bonding, KS service ask for help to cont