薄膜技术Xuhai Zhang 031Thin-Film Evaporation.pptVIP

3.3 The way to achieve thickness uniformity Locate both the surface evaporant source and the substrates on the surface of a sphere rotation 3.3 The way to achieve thickness uniformity h↑, l↓, rotate sample 3.3 The way to achieve thickness uniformity Ring-shape source 3.4 CONFORMAL COVERAGE OF STEPS AND TRENCHES When a film of the same thickness coats the horizontal as well as vertical surfaces of substrates, we speak of conformal coverage. (left) Schematic illustration of film coverage of stepped substrate. A, Uniform coverage; B, poor sidewall coverage; C, lack of coverage—discontinuous film