新型静电驱动双向平动MEMS变形镜.PDF

第 10 卷 第 4 期 纳 米 技 术 与 精 密 工 程 Vol. 10 No. 4 20 12 年 7 月 Nanotechnology and Precision Engineering Jul. 20 12 Novel Electrostatic Bidirectional鄄Translation MEMS Deformable Mirror ， ， ， 1 1 2 1 2 1 2 1 YAO Jun ， TAO Feng鄄gang ， REN Hao ， WANG Wei鄄min ， ZHUANG Xu鄄ye （1. State Key Laboratory of Optical Technologies for Microfabrication ， Institute of Optics and Electronics ， Chinese Academy of Sciences ， Chengdu 610209 ，China ； 2. Graduate University of Chinese Academy of Sciences ， Beijing 100039 ， China ） Abstract ： A novel electrostatic micro鄄electro鄄mechanical鄄system （MEMS ） deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts ： a central ， ， bottom electrode four electrostatic lever鄄actuators and an upper electrode i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode ， the displacement of the mirror plate was amplified by using four levers ； while in the downward mode ， a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a