Ellipsometry及技术讲解.pptVIP

Ellipsometry Matt Brown Alicia Allbaugh Electrodynamics II Project 10 April 2001 Ellipsometry Introduction History Methodology Theory Types of Ellipsometry Applications Summary History Fresnel derived his equations which determine the Reflection/Transmission coefficients in early 19th century. Ellipsometry used soon thereafter. Last homework assignment Electrodynamics I. Ellipsometry became important in 1960’s with the advent of smaller computers. Methodology Polarized light is reflected at an oblique angle to a surface The change to or from a generally elliptical polarization is measured. From these measurements, the complex index of refraction and/or the thickness of the material can be obtained. Theory Determine r = Rp/Rs (complex) Find r indirectly by measuring the shape of the ellipse Determine how e varies as a function of depth, and thickness L of transition layer. Concept: Integrate a Maxwell Equation along z over transition region of depth L. Result will be a new Boundary Condition. Fundamental Approximations: a. b. We assume certain field components , which vary slowly along z, are constant. Derivation of Drude Equation Derivation of Drude Equation Types of Ellipsometry Null Ellipsometry Photometric Ellipsometry Phase Modulated Ellipsometer Spectroscopic Ellipsometry Example Setup How to get r,an example.Phase Modulated Ellipsometry How to get r,an example.Phase Modulated Ellipsometry Applications Determining the thickness of a thin film Focus of this presentation Applications - Continued Research Thin films, surface structures Emphasis on accuracy and precision Spectroscopic Analyze multiple layers Determine optical constant dispersion relationship Degree of crystallinity of annealed amorphous silicon Semiconductor applications Solid surfaces Industrial applications in fabrication Emphasis on reliability, speed and maintenance Usually employs multiple methods Ellipsometry Ellipsometry can measure the oxide depth. Intensity doesn