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For Semiconductor and FPD Processes FTIR GAS (对于半导体和FPD过程红外光谱气体)
● Related product
In-line Gas Monitors
IR-150 Series
The IR-150 Series is a collection of in-line semiconductor gas concentration monitors
that use the NDIR method (nondispersive infrared absorption). These instruments are
ideal for implementing in-line control of the gas concentrations resulting from the
gasification of solid and liquid materials that are used in compound semiconductor
manufacturing processes, including TMAI, TMIn, TMGa, and DEZn.
●In-line design allows real-time concentration measurement
●Ideal for controlling the concentrations of MOCVD liquid and solid material gases
●Compact, mount-free design Manufactured by HORIBA STEC, Co., Ltd.
World-wide network ensures HORIBA STEC KOREA Ltd. For Semiconductor and FPD Processes
full after-sales service, HORIBA KOREA LTD.
when and where you need it. HORIBA BEIJING Rep. Office HORIBA STEC, Co., Ltd. (Tokyo) FTIR GAS ANALYZERS
The worldwide network of the HORIBA Group serves as the foundation for a
full after-sales service system. This system meets customer needs with a wide HORIBA SHANGHAI Rep. Office
range of services, including post-delivery training.
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