原创力文档表面镀铜悬浮厚单晶硅螺线MEMS电感 MEMS Inductor Consisting of Suspended Thick Crystalline Silicon Spiral with Copper Surface Coating.pdfVIP
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第27卷第4期 半 导 体 学 报 V01．27No．4
2006年4月 CHINESEJOURNALOFSEMICONDUCTORS Apr．，2006
MEMSInductor of Thick
ConsistingSuspendedCrystalline
Silicon with Surface
SpiralCopper Coating。
Wu
Wengan91”，LiYil，HuangFengyi2，HanXian91，ZhangShaoyon92，
Li Ha0
Zhihon91，andYilon91
(1National Fabrication
KeyLaboratoryofMicro／NanoTechnology，InstituteofMicroelectronics，
100871，China)
PekingUniversity，Beijing
(2InstituteRFOEICs，Southeast 210096，China)
of University，Nanjing
MEMS ofa siliconwitha surfacecoat—
Abstract：Anovel inductor spiral copper
consistingplanarsinglecrystalline
theconductoris a anodic and
as deepetching
ing presented．Usingsilicon-glassbonding
to substrateloss．
silicon isformed，whichis ona substrateeliminate
40“m-thick suspended
process，a spiral glass
toreducetheresis-
Thesurfacesofthesilicon arecoatedwith conformal electroless
spiral highly copperby plating
onthe ofthe forfinalsurface
tivelossintheconductor。withthinnickelfilm surface passiva—
plated copper
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