Corrosion characteristics of silicon carbide and （碳化硅和腐蚀特征）.pdf

Volume 98, Number 5, September-October 1993 Journal of Research of the National Institute of Standards and Technology [J. Res. Natl. Inst. Stand. Technol. 98, 607 (1993)] Corrosion Characteristics of Silicon Carbide and Silicon Nitride Volume 98 Number 5 September-October 1993 R. G. Munro and The present work is a review of the oxygen, mixtures of hot gaseous vapors, S. J. Dapkunas substantial effort that has been made molten salts, molten metals, and com- to measure and understand the effects plex environments pertaining to coal National Institute of Standards of corrosion with respect to the proper- ashes and slags. and Technology, ties, performance, and durability of var- ious forms of silicon carbide and silicon Key words: ash; ceramics; coal; corro- Gaithersburg, MD 20899-0001 nitride. The review encompasses corro- sion; silicon carbide; silicon nitride; sion in diverse environments, usually at slag. temperatures of 1000 °C.or higher. The environments include dry and moist Accepted: May 25, 1993 1. Introduction The present work is a review of the substantial and for more durable electronic packaging [7] and effort that has been made to measure and chemical processi