绝缘表面液膜检测电容传感器的几何参数研究.pdfVIP

Electrical Engineering and Automation September 2014, Volume 3, Issue 3, PP.21-27 Research on Geometric Parameter of the Capacitive Sensor for Liquid Membrane Detection on the Insulator Surface 1 2, # Ying Han , Nan LI 1. The twentieth Research Institute of China Electronic Technology Group Corporation, Xi’an 710071, China 2. Research Center for Non-destructive Testing and Evaluation, Beijing University of Technology, Beijing 100124, China #Email: nan.li@hotmail.co.uk Abstract A multi-pitch proximity capacitance sensor is proposed to improve the sensor performance, and the relation between the geometric parameters design of the sensor and the sensor performance is discussed. Compared to those traditional sensor geometries, such as array-based sensor, multi-ring based sensor, under the same measurement conditions, the multi-pitch based sensor’s electrical field distributions and the practical capacitance values are presented. The detail effects of the sensor design parameters, such as gaps between the sensor electrodes, the effective area and the geometry of the sensor plates are qualitative analysis. The experimental results prove that the complex structure sensor can improve the measurement linearity, signal strength and measurement sensitivity. Keywords: Proximity Capacitive Sensor; Multi-Pitch; Measurement Sensitivity; Geometric Parameter 绝缘表面液膜检测电容传感器的几何参数研究* 1 2 韩颖 ，李楠 1. 中国电子科技集团公司第二十研究所，陕西西安，710071 2. 北京工业大学机电学院无损检测与评估研究所，北京，100124 摘 要：设计了多螺旋盘形相邻电容传感器，并分析了传感器几何参数设计对其测量性能的影响。与传统的阵列式、多 环式相邻电容传感器在同等测量环境下进行测量，对各相邻电容传感器分别进行电场分布仿真和边缘电容测量值测量， 并进行比较分析，确定了包括极板间距