集成电路工艺与版图设计.pptVIP

集成电路工艺和版图设计概述Jian FangIC Design Center, UESTC;微电子制造工艺;IC常用术语;IC工艺常用术语;生产工厂简介;Fab Two was completed January 2, 1996 and is a State of the Art facility. This 2,200 square foot facility was constructed using all the latest materials and technologies. In this set of cleanrooms we change the air 390 times per hour, if you do the math with ULPA filtration this is a Class One facility. We have had it tested and it does meet Class One parameters (without any people working in it). Since we are not making microprocessors here and we dont want to wear space suits, we run it as a class 10 fab. Even