21.7 % Efficient PERC Solar Cells with AlOx （21.7%的效率与AlOx PERC太阳能电池）.pdf

26th European Photovoltaic Solar Energy Conference and Exhibition 21.7 % EFFICIENT PERC SOLAR CELLS WITH ALO TUNNELING LAYER X 1 1 1 1 1,2 1 D. Zielke , J.H.Petermann , F. Werner , B. Veith , R. Brendel and J. Schmidt 1 Institute for Solar Energy Research Hamelin (ISFH), Am Ohrberg 1, 31860 Emmerthal, Germany 2 Institute of Solid State Physics, Leibniz University Hanover, Appelstr. 2, 30167 Hanover, Germany ABSTRACT: A plasma-assisted atomic-layer-deposited aluminum oxide (AlO ) layer is implemented as a x + passivating tunnel layer between the aluminum contact grid and the phosphorus-diffused n -emitter of a passivated emitter and rear cell (PERC). The nominal AlOx layer thickness is varied between 0 and 0.96 nm. We determine experimentally an optimal AlOx layer thickness of 0.24 nm leading to an independently confirmed efficiency of 21.7 % and an open-circuit voltage ( V ) of 673 mV. Compared to the best V of a PERC solar cell without an AlO oc oc x layer we achieve an improvement in V of 12 mV clearly proving the excellent contact passi