3D microscope using diffraction grating（三维显微镜使用衍射光栅）.pdf

3-D microscope using diffraction grating Tom DeWitt DeWitt Brothers Tool Company, Inc. 237 Lafayette St., New York, NY 10012 Douglas Lyon University of Bridgeport, Computer Science and Engineering Department Bridgeport, CT 06460 E-mail : Lyon@cse.bridgeport.edu Abstract An optical microscope has been adapted for 3-D inspection of small capillaries in thread spinnerets by placing a diffraction grating between the microscope objective and the specimen. We show how a grating was specified using a quantitative analysis of groove spacing and geometry. An illumination system was specified based on incident angle and light wavelength. Specimens are placed on a robotic stage for positioning, and repositioning affords multiple perspective views of the target depending upon the diffraction order visible to the objective. Keywords: diffraction, range finder, microscope, grating, 3-D, third-dimension, profilomery, machine vision, metrology 1. Hole Metrology We have previously demonstrated the diffraction range finding technique for depth measurements on convex or moderately concave surfaces 1-10. An extreme case of concave geometry are cavities with parallel walls, i.e., holes. While commonplace in manufactured products, there are no ubiquitious optical instruments for their inspection. A key parameter in designing a hole metrology system is occlusion immunity, that is, the capability of the sysem to overcome shadowing effect caused by the hole walls. Occlusion particularly affects triangulation systems, because their readings are based on the baseline separation between a transmitter and a receiver. De