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基于硅悬臂梁谐振器的新型气体传感器 design of a silicon beam resonator for a novel gas sensor
第27卷第4期 半 导 体 学 报 V01．27No．4
2006年4月 CHINESEJOURNALOF
SEMICONDUCTORS Apr．．2006
ofaSiliconBeam
Design ResonatorforaNovelGasSensor
Hao YanGuizhen
Yilong’，Xu
Jiajia，ZhangGuobing，WuGuoying，and
(National
KeyLaboratoryofMicro／Nano-Fabrication
Technology，InstituteofMicroelectronics，
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