模具钢微细蚀刻速率的研究-表面技术.PDF

摇摇摇 40 宋卿等摇 模具钢微细蚀刻速率的研究 藡蕥蕥蕥蕥蕥蕥蕥蕥蕥藡蕥蕥 应用技术 藡蕥蕥蕥蕥蕥蕥蕥蕥蕥 藡 模具钢微细蚀刻速率的研究 宋卿,张永俊,于兆勤,王冠 (广东工业大学 机电学院,广州510006) 摘摇 要: 目的摇 研究模具钢微细蚀刻中,蚀刻速率的变化规律。 方法摇 采用蚀刻液喷淋加工方式,对掩 膜的模具钢表面进行蚀刻,考察掩膜间隙、蚀刻液喷淋压力、蚀刻液温度对蚀刻速率的影响。 摇 结果 蚀 刻速率随掩膜间隙尺寸的增大而增加,当掩膜尺寸大于150 滋m 时,蚀刻速率增长较快;较大的喷淋压力 有利于蚀刻液的更新和蚀刻产物的排除,使得蚀刻反应充分,蚀刻速率较高;温度在一定范围内升高,蚀 刻液活性增大,蚀刻效率提高,蚀刻速率增大。 结论摇 最佳工艺条件为:掩膜间隙尺寸150 ~200 滋m,蚀 刻液喷淋压力1.0~1.4 MPa,蚀刻液温度35~40 益。 在此加工条件下,模具钢的蚀刻速率高,加工效率 高,同时可以保证较好的蚀刻尺寸精度。 关键词:微细蚀刻;模具钢;蚀刻速率 中图分类号:TG176摇 摇 摇 文献标识码:A摇 摇 摇 文章编号:1001鄄3660(2013)06鄄0040鄄04 Study on Etching Rate of Die Steel in Micro鄄etching SONG Qing,ZHANG Yong鄄jun,YUZhao鄄qin,WANG Guan (Institute of Mechatronics,Guangdong University of Technology,Guangzhou510006,China) ABSTRACT:Objective摇 The variationof etchingrateinmicro鄄etchingonthediesteelwasstudied. Methods摇 Spray etching wasused in etching the surface of the die steel with mask processing. The impact of the mask gap width,spray pressure and etchant temperature on the etching ratewasinvestigated. Results摇 The etching rate increasedwith the in鄄 creasing mask gap width,when the mask gap waswider than 150 滋m,the etching rate increased rapidly. Larger spray pressurewas benefit for updating the etchant and excluding the etching product,when the reaction was sufficient,the etching rate increased. When the etchant temperature elevatedwithin a certainrange,the etchant activity increased,so asthe etching efficiency and the etching rate. Conclusion摇 The optimal condition was a mask gap width of 150 ~200 滋m,a spray pressure of 1.0~1.4 MPa,amd an etchant temperature of 35~40 益. Under this condition,the etching rate and the processing efficiency were both high. Meanwhile,it helped to ensure a higher dimensional ac