a 2×2 soi mach-zehnder thermo-optical switch based on strongly guided paired multimode interference couplers.pdfVIP
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a 2×2 soi mach-zehnder thermo-optical switch based on strongly guided paired multimode interference couplers
V01.3 2007
LETTERS No.5,15
OPTOELECTRONICS September
X switchbasedon
A2 2SOlmach-zehnder
thermo·optical
interference
multimode
paired
stronglyguided
YU
YANGgiI++,WANG Mil,CHENShao-wu2,andJin-zhon92
Yi-quanl,LV
1.Institute andEngineering,Central
ofP的sics
2.State on ofSemiconductors,ChineseAcademyofSciences,Beijing,
KeyLaboratoryIntegratedOptoelectronics,Institute
100083,China.
16 2007)
(ReceivedApril
Asilicon.on—insulator2×2Mach-Zehnder switchis basedon guided multi—
thermo—opticaldevelopedstronglypaired
modeinterference multimode—interferencewereetched for characteristics
couplers.The couplers deeplyimprovingcoupler
suchas andfabricationtolerance.Theswitchachieves
self-imagingquality,uniformity proposed goodperformances,
loss lossof_4.3dBandafast measured
alowinsertionof一11.0dB.a response
including fiber—waveguidecoupling speed
tobe3.5and8.8 forraiseandfall time,respectively.
Ixs switching
Anicle
CLCnumbers:TN256Documentcode:A lD:1673.1905(2007)05—0334—03
DOI
10.1007/s11801—007—7050一Y
isa tech—
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