原创力文档pecvd淀积介质层对mosfet性能的影响 impact of dielectric layer deposited by pecvd on performance of mosfet.pdfVIP
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pecvd淀积介质层对mosfet性能的影响 impact of dielectric layer deposited by pecvd on performance of mosfet
第 卷 第 期 电 子 器 件
29 Vol.29 No.
1 1
! !
年 月 !!! ChineseJournalofelectron Devices !!
2006 3 Mar.2006
Im actofdielectriclaerdeositedb PECVdonPerformanceofMOSFET
p y p y
s s s
YANG jian
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