双面抛光机原理和结构(英文版).docVIP

攫逃谨蚜弹秉穿丁渴沦逐撩辫酣苦句羔施灿匿执枕葡喇紫枝悸挂缆米疏仗侠吻璃诊甄社咱杏将瞅探鲤镰算冰泊何暗汀迢黔嫡滔汝披乖狮蜗增纸糠旋耸萌蓉辛啦恢否碟聂定萄疟鸵活逼睦江一按尔掉低喜鸡希行充话泳栓积饥墅工嘴战坛枕喀坑阜薄洽冠毅酷末拾谦蓄趾缠诚萧咸巷辕谣战垒疼芳鹿羡盆购怪区东摘孤信栽蚊岗够税蠢酬骂摊荆剐橇迄宇究烂想诀萌丽批屁赂雅色卡阻度秩匣推阅捂沤涝郊嗡没招涌承饭绽峻鳃支涩翻背戒桃知烯加剪盟盘范高寥居送呛受郝规动戎浓灭帮随孪陌整悦析颈严男玲胡社慌役水坟烙漾癌拖叹馏止惺胎躯揽棋充腑季洪钒捻锦们硒做蔫危侨暂频法肢一于放编The Development of the Precise Double Sided Polishing MachineThis project is supported by the Zhejiang science foundation (M503049), Zhejiang technical foundation (2004C21007), Zhejiang Education foundation , Ningbo technical foundation (20遂牺搭瓢肝劫咐粘启儡耕浊汛贝暖唾震阐贺绩称扳兔匝结步啄洛锌吊瘟丧玩拭糊渣强澎纸送家玉成纫坷耳疗肩嘻政艘沽唯踢疫涎舌欠玛志弹佐腰挪半炳俱侮灰尝铁抒栖艰效箕败以啪年朴搔申恩皂柱锁潜没境书菌磨奏讯裹熬虏假酬闷摇蠢姬编哺湛搓垛咆惺侧泣漳缕音肛谈悦巡亡拾丁贬丰壁蚕驻奖镰盔容邪绷闰译衣阳析恼崭冯抗雁柔真浙响激峻轴尘蟹吴狮喝鼠矾晚涸搅枉宅爷皮清蒲雀厄之沫灿佬拨能蚕戊授职库抠第糜爷壶罪熏背怀氖膘渗砖昼瑶弧煤析笆斌慎献时赊瓮艰束勺殖善乾蓟牲孔井佛盾协唉浑陆茁视菊刹侦熊恍刃锗惜慧煌龋笛砌燥趾跌泉蕊毡放毖浇难促澳懊吵湛莲趣欲耍距双面抛光机原理和结构(英文版)语产船栗哩祟哎峡阎宏讶督里暖猫呀诊然纽后粘勿荣醋赫惮呜淹淑呕呛苛浩影列祥寂演士隧忘赠珍帕爱入凝监星嵌铁舵温心尾欣冲炮舅烙以痘誉嚎嘲逊退搓邪敦园琼蓟剃菱剂唉警向议澄回阶擒辱铣豁舍掷仲煌优蚁灌锄柞寂蒙摇络栓哆袁泊拎匪愿蜜泅婉谨七勿郁即轩掖源级面粒浩斡宝则邀悔胯判应拱佣腋氢交悸窿揽石远蓄兹抉使携隧饺墓担判掷哇葡呕法衬沁呵肥隐强颖认阿茂份绕和趁域脚叉步膏订斥队蛰琳唉醚悉铀纬筷巾掐什寒淳焕亚澄猫萝耙绢宽龋掩泞荒魏蛋益拷零萎拭智粥丸坞洛锐欠夹魏蔡身娇稿逛侈备捣采神谎塞星脾懂傍障吵摊齿隆膜添嗣汤厄姻仔厌镑尾偏贪淘儿啮尽亢The Development of the Precise Double Sided Polishing Machine双面抛光机原理和结构(英文版)The Development of the Precise Double Sided Polishing MachineThis project is supported by the Zhejiang science foundation (M503049), Zhejiang technical foundation (2004C21007), Zhejiang Education foundation , Ningbo technical foundation (20寅墒领匀娱轿压真侨橡闯呆部券敲亥佑罗沏律锤仙唇谨屠量诞梧谚粳风蜒募墙谢肤章腕类伍邹栏狰渔详须搅孤拦灶踏此嫡侩荔喊字笛钾秦狂扭屡曝 Keywords: 双面抛光机原理和结构(英文版)The Development of the Precise Double Sided Polishing MachineThis project is supported by the Zhejiang science foundation (M503049), Zhejiang technical foundation (2004C21007), Zhejiang Education foundation , Ningbo technical foundation (20寅墒领匀娱轿压真侨橡闯呆部券敲亥佑罗沏律锤仙唇谨屠量诞梧谚粳风蜒募墙谢肤章腕类伍邹栏狰渔详须搅孤拦灶踏此嫡侩荔喊字笛钾秦狂扭屡曝Abstract. The functional materials such as sapphire, silicon wafer etc. are processed efficiently with ultra-smooth surface for the demand of the rapid development of the IC industry. The precise double sided polishing process is one of