design of pixellated cmos photon detector for secondary electron detection in the scanning electron microscope设计二次电子检测的像素cmos光子探测器扫描电子显微镜.pdfVIP

Hindawi Publishing Corporation Advances in OptoElectronics Volume 2011, Article ID 648487, 7 pages doi:10.1155/2011/648487 Research Article Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope Joon Huang Chuah1, 2 and David Holburn1 1 Electrical Engineering Division, Department of Engineering, University of Cambridge, 9 JJ Thomson Avenue, Cambridge CB3 0FA, UK 2 Department of Electrical Engineering, Faculty of Engineering, University of Malaya, 50603 Kuala Lumpur, Malaysia