fabrication and electrical characterization of multiwalled carbon nanotube-based circuit at room temperature基于碳纳米管的电路制造和电气特性的微在室温下.pdfVIP

Hindawi Publishing Corporation Journal of Nanomaterials Volume 2011, Article ID 297534, 5 pages doi:10.1155/2011/297534 Research Article Fabrication and Electrical Characterization of Multiwalled Carbon Nanotube-Based Circuit at Room Temperature Yitian Peng,1, 2 Yuanzhong Hu,3 and Weibing Lu4 1Jiangsu Key Laboratory of Design and Manufacture of Micro/Nano Biomedical Instrument, Southeast University, Nanjing 211189, China 2 State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400044, China 3 State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China 4 State Key Laboratory of Millimeter Waves, School of Information Science and Engineering, Southeast University, Nanjing 211189, China Correspondence should be addressed to Yitian Peng, pengyitian@ Received 27 March 2010; Revised 25 April 2010; Accepted 17 May 2010 Academic Editor: Jianyu Huang Copyright © 2011 Yitian Peng et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. Multiwalled carbon nanotube (MWCNT) deposited on a pair of predetermined aluminum electrodes treated with the (3-Aminopropyl)-triethoxysilane (APTES) self-assembled monolayers (SAMs). The MWCNT bridges electrodes and forms electrode/MWCNT/electrode circuit on silicon with 500 nm silicon dioxide. Then the Metal (Ti/Au) pads were fabricated on MWCNT to bury the MWCNT into metal electrodes. The electrical properties of MWCNT-based circuits before and after the fabrication of metal pads were characterized. Results indicate that metal pads on MWCNT improved