advances in contactless silicon defect and impurity diagnostics based on lifetime spectroscopy and infrared imaging先进的非接触式硅缺陷和杂质诊断基于终身光谱和红外成像.pdfVIP

Hindawi Publishing Corporation Advances in OptoElectronics Volume 2007, Article ID 92842, 9 pages doi:10.1155/2007/92842 Review Article Advances in Contactless Silicon Defect and Impurity Diagnostics Based on Lifetime Spectroscopy and Infrared Imaging Jan Schmidt, Peter Pohl, Karsten Bothe, and Rolf Brendel Institut fur Solarenergieforschung Hameln/Emmerthal (ISFH), Am Ohrberg 1, 31860 Emmerthal, Germany ¨ Received 19 March 2007; Accepted 12 April 2007 Recommended by Armin G. Aberle This paper gives a revie