原创力文档fabrication of two-dimensional periodic tio2 pillar arrays by multi-beam laser interference lithography制造二维周期性二氧化钛柱阵列多波束激光干涉光刻技术.pdfVIP
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fabrication of two-dimensional periodic tio2 pillar arrays by multi-beam laser interference lithography制造二维周期性二氧化钛柱阵列多波束激光干涉光刻技术
Vol.1, No.3, 176-180 (2009) Natural Science
doi:10.4236/ns.2009.13022
Fabrication of two-dimensional periodic TiO pillar
2
arrays by multi-beam laser interference lithography
1 2
Hiroyo Segawa , Hiroaki Misawa
1Exploratory Nanomaterials Research Laboratory, National Institute for Materials Science, Tsukuba, Japan
2Research Institute for Electro
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