终端式mems微波功率传感器的结构模拟 simulation of terminating type mems microwave power sensors structure.pdfVIP

第 期 电 子 元 件 与 材 料 4 Vol.25 No.4 年 月 ELECTRONIC COMPONENTS MATERIALS 2006 4 Apr. 2006 研究与试制研究与试制 研究与试制研究与试制 R D 终端式MEMS 微波功率传感器的结构模拟 范小燕 廖小平 摘要: Coventorware HFSS MEMS CPW CPW 50 CPW 50 μm GaAs Au TaN 关键词: MEMS 中图分类号: TP2 12 文献标识码:A 文章编号:100 1-2028 2006 04-0050-03 Simulation of Terminating Type MEMS Microwave Power Sensor’s Structure FAN Xiao-yan, LIAO Xiao-ping (Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 2 10096, China) Abstract: Based on process and materials, the indirectly-heated terminating type MEMS microwave power sensor’s structure was simulated and designed using Coventorware and HFSS. The temperature distribution on the coplanar waveguide(CPW) and the terminal resistors was simulated, and so did the impact of approach of the thermopile on the CPW. In the end, the design is specified, the number of the thermocouple is 50, and the distance between the CPW and the thermopile is 50 μm. GaAs and Au are chosen as hands of the thermopile, and TaN as the terminal resistor. Key words: electronic technology; coplanar waveguide; terminal resistor; thermopile; MEMS; sensor 微波功率是电磁学中一个很重要的参数 它的测 而完全匹配是很难获得的 它不仅与制造工艺相关 量已成为电磁测量的重要部分 在微波信号的产生 而且与所选择的材料也有关 在良好匹配的条件下 传输及接收等各个环节的研究中 微波功率测量是必 要获得高的灵敏度和响应速度 主要依赖于热电堆的 不可少的 随着经济的发展 科技的进步 微波功率