a noise-shaping accelerometer interface circuit for two-chip implementationnoise-shaping加速度计为二芯片的接口电路的实现.pdfVIP

VLSI Design, 2002 Vol. 14 (4), pp. 355–361 A Noise-shaping Accelerometer Interface Circuit for Two-chip Implementation* TETSUYA KAJITA, UN-KU MOON and GABOR C. TEMES† Electrical and Computer Engineering Department, 220 Owen Hall, Oregon State University, Corvallis, OR 97331-3211, USA (Received 1 May 2000; Revised 5 December 2000) This paper introduces a new architecture for sensor interface circuits using a delta–sigma modulator. The three-level force feedback allows the use of a digital compensator to stabilize the loop. A 3rd-order delta–sigma structure shapes the op-amp noise and allows a two-chip implementation with high loop gain at low frequencies. Keywords: Sensor; Delta–sigma; Interface; Force feedback; Mismatch shaping; Acceleration INTRODUCTION to the wiring between sensors and circuits: large kTC charges and large gain for the op-amp noise. A cross- Modern micromachining technology allows the fabrica- coupled integrator is proposed to solve these problems. tion of mechanical sensors on chip. A successful Also, using a higher-order delta–sigma loop increases the application is the accelerometer, widely used in loop gain and reduces nonlinearity. automobile air-bag systems. This is basically a capacitive In the second section, we describe the sensor sensor, but its capacitance is quite small. There are several characteristics. In the third section, we propose a new ways to sense the capacitance accurately. Ou