rf power and thermal annealing effect on the properties of zinc oxide films prepared by radio frequency magnetron sputtering射频功率和热退火氧化锌的性质影响电影由射频磁控溅射.pdfVIP

Hindawi Publishing Corporation Research Letters in Materials Science Volume 2007, Article ID 26459, 5 pages doi:10.1155/2007/26459 Research Letter RF Power and Thermal Annealing Effect on the Properties of Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputtering Chaoyang Li,1, 2 Mamoru Furuta,1, 2 Tokiyoshi Matsuda,1, 2 Takahiro Hiramatsu,2, 3 Hiroshi Furuta,1, 2 and Takashi Hirao1, 2 1 Research Institute, Kochi University of Technology, Kami, Kochi 782-8502, Japan 2 Kochi Industrial Promotion Center, Kami, Kochi 782-8502, Japan