room-temperature growth of sic thin films by dual-ion-beam sputtering deposition室温增长sic双离子束溅射沉积的薄膜.pdfVIP

Hindawi Publishing Corporation Research Letters in Physical Chemistry Volume 2008, Article ID 760650, 5 pages doi:10.1155/2008/760650 Research Letter Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition C. G. Jin,1, 2 X. M. Wu,1, 2 and L. J. Zhuge2, 3 1 Department of Physics, Suzhou University, Suzhou 215006, China 2 The Key Laboratory of Thin Films of Jiangsu, Suzhou University, Suzhou 215006, China 3 Analysis and Testing Center, Suzhou University, Suzhou 215006, China Correspondence should be addre