原创力文档stable adaptive fuzzy control with hysteresis observer for three-axis micronano motion stages稳定的自适应模糊控制与磁滞观察者三轴微纳运动阶段.pdfVIP
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stable adaptive fuzzy control with hysteresis observer for three-axis micronano motion stages稳定的自适应模糊控制与磁滞观察者三轴微纳运动阶段
Intelligent Control and Automation, 2012, 3, 390-403
/10.4236/ica.2012.34043 Published Online November 2012 (http://www.SciRP.org/journal/ica)
Stable Adaptive Fuzzy Control with Hysteresis Observer
for Three-Axis Micro/Nano Motion Stages
Lih-Chang Lin, Bor-Yih Chang, Biing-Der Liaw
Department of Mechanical Engineering, National Chung Hsing University, Taichung, Chinese Taipei
Email: lclin@.tw
Received July 31, 2012; revis
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