structural and mechanical properties of crnx coatings deposited by medium-frequency magnetron sputtering with and without ion source assistancecrnx涂料的结构和机械性能通过中频磁控溅射沉积和离子源的援助.pdfVIP

Hindawi Publishing Corporation Journal of Nanomaterials Volume 2011, Article ID 534647, 7 pages doi:10.1155/2011/534647 Research Article Structural and Mechanical Properties of CrNx Coatings Deposited by Medium-Frequency Magnetron Sputtering with and without Ion Source Assistance Can Xin Tian,1 Bing Yang,2 Jun He,1 Hong Jun Wang,1 and De Jun Fu1 1 Department of Physics and Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education, Wuhan University, 430072 Wuhan, China 2 School of Power and Mechanical Engineering, Wu