static and motional feedthrough capacitance of flexural microresonator静态和动态弯曲microresonator引线电容.pdfVIP

Hindawi Publishing Corporation Active and Passive Electronic Components Volume 2011, Article ID 546986, 6 pages doi:10.1155/2011/546986 Research Article Static and Motional Feedthrough Capacitance of Flexural Microresonator Wen-Teng Chang Department of Electrical Engineering, National University of Kaohsiung, Kaohsiung 81148, Taiwan Correspondence should be addressed to Wen-Teng Chang, wtchang@.tw Received 16 June 2011; Accepted 8 August 2011 Academic Editor: Ching Liang Dai Copyright © 2011 Wen-Teng Chang. This is an