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current tunnelling in mos devices with gate dielectric目前隧道与闸极介电层金属氧化物半导体设备
Hindawi Publishing Corporation
Research Letters in Physics
Volume 2008, Article ID 286546, 5 pages
doi:10.1155/2008/286546
Research Letter
Current Tunnelling in MOS Devices with
Al O / SiO Gate Dielectric
2 3 2
A. Bouazra,1 S. Abdi-Ben Nasrallah,1 M. Said,1 and A. Poncet2
1 Unite de Recherche de Physique des Solides, Departement de Physique, Faculte des Sciences de Monastir, 5019 Monastir, Tunisia
´ ´ ´
2 Laboratoire de P
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