磁过滤电弧离子镀TiN薄膜的制备及性能研究.PDF

See discussions, stats, and author profiles for this publication at: /publication/282161757 Synthesis and characterization of TiN coating grown by magnetic filtered arc ion plating Article in Zhen ong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology · April 2015 DOI: 10.13922/ i.cjovst.2015.04.11 CITATIONS READS 0 15 5 authors, including: X.C. Zhong South China University of Technology 94 PUBLICATIONS 620 CITATIONS SEE PROFILE Some of the authors of this publication are also working on these related projects: Preparation and functional properties of oxide nanostructures by thermal oxidation View project the Natural Science Foundation of Guangdong Province View project All content following this page was uploaded by X.C. Zhong on 05 January 2016. The user has requested enhancement of the downloaded file. 35 4 真 空 科 学 与 技 术 学 报 第 卷 第 期 444 CHINESE JOUＲNAL OF VACUUM SCIENCE AND TECHNOLOGY 2015 4 年 月 磁过滤电弧离子镀TiN 薄膜的制备及性能研究 1 1* 1 1 2 张启沛 钟喜春 李春明 匡同春 郭燕伶 (1． 华南理工大学材料科学与工程学院 广州 510640 ;2 ． 广州番禺职业技术学院 番禺 511483) Synthesis and Characterization of TiN Coating Grown by Magnetic Filtered Arc Ion Plating Zhang Qipei1 ，Zhong Xichun1* ，Li Chunming1 ，Kuang Tongchun1 ，Guo Yanling2 (1. School of Materials Science and Engineering ，South China University of