可挠式基板卷式镀膜设备及氧化铟锡ITO镀膜开发The-YOKE.PDF

可撓式基板捲式鍍膜設備及氧化銦錫(ITO)鍍膜開發 The Development of Roll-to-roll PVD Sputtering System and ITO Coating on Flexible Substrates 許恭銘 邱松茂 楊景富 謝志男 黃家宏 G.M. Hsu S.M. Chiu C.F. Yang J.N. Shieh C.H. Huang 金屬工業研究發展中心 Metal Industries Research and Development Centre 摘 要 目前國內可撓式薄膜產品所使用的材料與捲式鍍膜設備大多由美、德、日 或歐洲掌控，售價動輒上億元新台幣，外商對於機台客製化設計與及時的後勤 維修支援性較不足，讓國內廠商產品研發的腳步受到限制。 金屬中心以自主發展之真空抽氣系統 、節流閥及濺鍍設備等之專利技術， 再整合捲軸式送料定張力調控模組控制，成功完成捲式鍍膜量產系統之設計。 進一步串聯整合及協助國內加工廠商建立次系統供應鏈體系(如靶源精密加 工、磁控濺射源、真空腔體、真空電引入等) ，開發出國內第一套全自主設計 製造之具壓差真空腔體、軟板傳輸及透明導電膜(TCO)鍍膜模組系統。藉由此 捲式鍍膜設備已開發出 ，在 PET 材料上被覆100nm 氧化銦錫(ITO)鍍層厚度 下，具高透光性(89%)及低面阻抗(50Ω/sq)高品質特性之ITO 鍍膜 。 關鍵詞：捲鍍設備、可撓式基板、透明導電膜 Abstract Most of the ITO film materials and roll-to-roll coating equipments imported almost from overseas developed country like USA, Germany or Japan. Each commercial roll-to-roll coating equipment costed domestic company at least several hundreds of millions NT dollars. However, the short of customizing design and real-time after service, there are many limitations for speeding up the marketing of new flexible electronics. MIRDC had integrated many own patents related with vacuum pumping design, throttle valve and sputtering source with very precise constant tension control modulus for roll-to-roll feeding system. MIRDC not only had completed the whole system design of roll-to-roll PVD sputtering equipment but also constructed the domestic supply chain of sub-system like precious machining, sputtering sources, vacuum chamber manufacturing and electric feeding through components. The high quality characteristic of ITO coating on PET substrate, the 1 transmission 89% and sheet resistance 50Ω/sq at a film thickne